 
          Kristina Bespalova
Postdoctoral Researcher
              
            Postdoctoral Researcher
                T410 Dept. Electrical Engineering and Automation
              Full researcher profile
                
              Phone number
                +358504127838
              Areas of expertise
Honors and awards
JVST A Best ALD Paper Award
      Award for paper "Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls, by Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen and Mervi Paulasto-Kröckel, JVST A 39, 032403 (2021)"
    
    
          
        Palkinto tai huomionosoitus tuotoksesta
      
              
        Kemian ja materiaalitieteen laitos
      
              
        Jun 2021
      
      
Research groups
- Electronics Integration and Reliability, Tutkijatohtori
Publications
            
        Kristina Bespalova
      
              
        2024
      
              
            
        Kristina Bespalova, Glenn Ross, Sami Suihkonen, Mervi Paulasto-Kröckel
      
              
        2024
      
                  
        Advanced Electronic Materials
      
      
            
        Kristina Bespalova, Tarmo Nieminen, Artem Gabrelian, Glenn Ross, Mervi Paulasto-Kröckel
      
              
        2023
      
                  
        Advanced Electronic Materials
      
      
            
        Gabrelian Gabrelian, Glenn Ross, Kristina Bespalova, Mervi Paulasto-Kröckel
      
              
        2022
      
                  
        Materials Today Communications
      
      
            
        Prokhor A. Alekseev, Bogdan R. Borodin, Pavel Geydt, Vladislav Khayrudinov, Kristina Bespalova, Demid A. Kirilenko, Rodion R. Reznik, Alexey Nashchekin, Tuomas Haggren, Erkki Lahderanta, George E. Cirlin, Harri Lipsanen, Mikhail S. Dunaevskiy
      
              
        2021
      
                  
        Nanotechnology
      
      
            
        Kristina Bespalova, Elmeri österlund, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, Tuomas Pensala
      
              
        2021
      
                  
        Journal of Microelectromechanical Systems
      
      
            
        Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen, Mervi Paulasto-Kröckel
      
              
        2021
      
                  
        Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
      
      
            
        Kristina Bespalova, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Sebastian Thanniyil, Cyril Karuthedath, Stefan Mertin, Tuomas Pensala
      
              
        2020
      
              
        Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020
      
          
 
           
           
           
           
           
          